Gaya APA

Hsu, Tai-Ran. (2002). MEMS and microsystems : design and manufacture . Boston: Mcgraw-hill.

Gaya Chicago

Hsu, Tai-Ran. MEMS and microsystems : design and manufacture. Boston: Mcgraw-hill, 2002. Text.

Gaya MLA

Hsu, Tai-Ran. MEMS and microsystems : design and manufacture. Boston: Mcgraw-hill, 2002. Text.

Gaya Turabian

Hsu, Tai-Ran. MEMS and microsystems : design and manufacture. Boston: Mcgraw-hill, 2002. Print.